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End Stations for Microstructure Fabrication
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Micromachining Station
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Beamline :
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BL18B1
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Contact :
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Bor-Yuan Shew, ext.7316, yuan@nsrrc.org.tw
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LIGA is a micromachining technique including lithography, electroforming and
micro molding. High intensity and highly collimated SR X-rays is used to
provide high resolution and high aspect ratio lithographic capability. LIGA
technique has been widely used in micro optic, micro mechanic and microwave
applications. At NSRRC, all the LIGA processes, including x-ray mask
fabrication, can be done in the micromachining station.
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